Ulvac RFP-N - Common Matching Box Specifications

RF POWER SUPPLY and MATCHINGBOX
2. Overview
18
2-9. Common matching box specifications
Table 2-15 VPP/VDC sensor specifications
VPP/VDC sensor model
VDC scale
VPP scale
VDP-13HU
0 to -2500 V
0 to 10000 V
VDP-13HH
0 to -2500 V
0 to 5000 V
VDP-13HM
0 to -2500 V
0 to 2500 V
VDP-13MM
0 to -1000 V
0 to 2500 V
VDP-13ML
0 to -1000 V
0 to 1000 V
Table 2-16 Standard equipment VPP/VDC sensors
Matching box model
Standard equipment VPP/VDC sensor model
MBX-1305N
VDP-13HM
MBX-1310N
VDP-13HM
MBX-1330N
VDP-13HH
MBX-1350N
VDP-13HU