RF POWER SUPPLY and MATCHINGBOX
1
1. For Safe Operation
1-1. Precautions when handling the system
In order to safely use the system, this chapter describes the precautions, locations of warning labels,
and contact information for safe operation.
The voltage generated by this RF Generator is sufficient enough to pose a danger
to human life. The utmost care must be taken when handling the system. If a person
accidentally comes into contact with this voltage, it will lead to a serious accident.
Take great care not to come into contact with high voltages. DANGER: Never
energize the RF Generator with the cover removed. Do not open any covers other
than those specified in this instruction manual.
In order to prevent electric shock, always ground the cases of this equipment and
ground the wiring before energizing the system. In order to prevent electric shock
from ground leakage, do not use the system in environments where there is a
possibility of condensation. DANGER: Risk of electric shock and accidents from
ground leakage if liquids leak into the interior of the equipment.
The RF generator and matching box handle high voltages internally. When
performing maintenance on the interior of the equipment, always shut off the primary
side breaker for the power supply used and confirm that the AC power supply has
been shut off, then wait three minutes or more before opening the specified cover.
Interior maintenance work must be done by a technician specified by ULVAC or
under the direction of such a person. For maintenance work where the interior may be
opened, see "Chapter 7 Maintenance".
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