Ulvac RFP-N - RF Generator Protection and External Control

RF POWER SUPPLY and MATCHINGBOX
4. Functions
38
4-1-4. Descriptions of protection functions
Table 4-2 RF generator protection functions list
Protection cause
Protection
Details
PR
Pf droop
Suppresses traveling wave power if reflected wave power exceeds the rating.
RF-OFF
Traveling wave power stops when the above status continues for 30 seconds or longer.
OC
Pf droop
Suppresses traveling wave power if the RF amplifier input current exceeds the rated value.
RF-OFF
Stops traveling wave power if the RF amplifier input current exceeds the rated value.
OV
Pf droop
Suppresses traveling wave power if the RF amplifier input voltage exceeds the rated value.
RF-OFF
Stops traveling wave power if the RF amplifier input voltages exceeds the rated value.
OP
Pf droop
Suppresses traveling wave power if the RF amplifier input power exceeds the rated value.
VPP
RF-OFF
Stops traveling wave power if the matching box output terminal voltage exceeds the rated
value.
ARC
Pf shut off
Shuts off traveling wave power if the reflected wave power momentarily exceeds the rated
value, then after a certain amount of time elapses, it automatically recovers.
INTLOCK
RF-OFF
Stops traveling wave power when the external interlock has operated.
ALARM
RF-OFF
Stops traveling wave power when an alarm occurs.
*When an alarm occurs, the RF output is turned off, and the alarm name is displayed on the panel.
*When an alarm occurs, the ALARM LED on the RF generator's front panel turns red.
*The alarm state is maintained until the alarm is cleared by removing the cause of the alarm and
resetting, and then it is output again with the RF-ON operation after reset.
*When a warning occurs, RF output continues and the warning name flashes on the panel.
*When the cause of the warning goes away, the warning name display disappears.
*For the alarm and warning specifications, see "RF generator ALARM specifications" and "RF
generator WARNING specifications".