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7. Maintenance
The chapter describes necessary maintenance so the system can be used for years to come.
If you neglect to maintain the system, it will wear down more quickly and malfunction. Read this
chapter careful and perform all maintenance.
7-1. RF Generator maintenance and inspection
RF generator inspection and maintenance is described below. About once every six months, remove
the RF generator's cooling water tubes and inspect the connectors for corrosion and clogs. For models
that use fan filters, check the filters periodically for clogging. The parts that require periodic RF
generator maintenance are listed below.
Table 7-1 RF generator recommended parts for regular replacement
* The recommended usage interval for replacement is not a guarantee of product service life.
* The speed of degradation for these products greatly differs according to the frequency of
equipment use and the usage conditions.
* In particular, the service life of the power semiconductors will vary by the usage methods. The
service life will decrease when the usage environment temperature is high, in frequent ON/OFF
cycle operations, and in operation near the rating.
* The service life of components will decrease faster the higher the usage environment temperature
is.
* The service life of mechanical operation components (such as connectors) is defined by the
operation count,and the service life time decreases by operation count.
* When stored in the unpowered state, deterioration of the internal elements may occur in a shorter
period than the recommended periodic replacement period above.
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