Ulvac RFP-N - System Functions; RF Generator Panel Operations

RF POWER SUPPLY and MATCHINGBOX
4. Functions
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4. Functions
4-1. Descriptions of RF generator functions
4-1-1. Descriptions of front panel functions
Figure 4-1 RFS-1305N/RFS-1310N front panel example
Figure 4-2 RFS-1330N/RFS-1350N front panel example (built-in controller type)
Figure 4-3 RFS-1330N/RFS-1350N front panel example (standalone controller type)