Ulvac RFP-N - Descriptions of Parameter Functions

RF POWER SUPPLY and MATCHINGBOX
4. Functions
45
4-3. Descriptions of parameter functions
For RF Generator parameters, there are normal mode parameters and maintenance mode
parameters. "P5" and subsequent screens can be displayed in maintenance mode.
T
L
I
F
E
=
0
k
W
h
r
R
F
O
N
=
0
H
r
M
A
I
N
T
E
Figure 4-14 Target life screen (P4)
 For maintenance mode, display the above screen in the "RF-OFF" state, and press the "ON"
key while holding down both the "▼" key and the "▲" key at the same time. The values for
parameters can be displayed and modified on the front panel or the RFP-N.
P
f
=
0
W
/
0
W
P
r
=
0
W
A
M
C
=
A
U
T
O
V
D
C
=
2
5
0
0
V
T
=
5
0
%
V
P
P
=
2
5
0
0
V
M
=
5
0
%
Figure 4-15 Main screen (P1)
Item
Parameter details
Pf
Displays the current value for the traveling wave power (left) and configures the
setting (right).
When the Pf setting value is less than 10 W, this becomes the 0 W setting.
Pr
Displays the reflected wave power.
Pr can be set in maintenance mode, and auto matching is performed at the Pr
setting value or less.The completion judgment is performed and the variable
capacitors stop.
AMC
Sets the auto matching mode.
AMC=AUTO: Set auto matching
AMC=MANU: Set manual matching.
VDC
Displays the current VDC value.
The rating setting can be changed when in maintenance mode.
VPP
Displays the current VPP value.
The rating setting can be changed when in maintenance mode.
T
Displays the current position of the TUNE variable capacitor.
M
Displays the current position of the MATCH variable capacitor.