Ulvac RFP-N - Matching Box Troubleshooting

RF POWER SUPPLY and MATCHINGBOX
8. Troubleshooting
88
8-1-2. Matching box troubleshooting
Table 8-2 Matching box troubleshooting list
No.
Problem
Cause
1
The matching point has changed.
①The gas pressure, distance between ES, or
substrate load conditions have changed.
②Wiring or screws inside the matching box are
loose or missing.
2
Reflected wave power (Pr) does not
decrease.
① Insufficient matching adjustment
②No discharge due to the gas pressure, distance
between ES, or substrate load conditions.
3
Variable capacitors not operating in
manual mode.
①A RF Generator internal control element has
broken.
②Mechanical breakdown or deterioration of the
variable capacitors or couplings.
③Communication cable break or poor connector
contact.
4
The auto matching operation is not
performed in auto matching mode.
①The matching mode is not AUTO.
②For external control, pins 34 and 35 of
"EXT.CONT", the external control connector, are
short circuited (manual mode)
③A RF Generator internal control element or the
controller has broken.