Ulvac RFP-N - Descriptions of External Control (RS-232 C) Functions

RF POWER SUPPLY and MATCHINGBOX
4. Functions
59
4-4. Descriptions of external control (RS-232C) functions
Table 4-6 Communication parameters
Communication speed
9600 bps
Character length
8bit
Parity check
None
Stop bit length
1bit
X parameter
None
Table 4-7 Connector pin layout
D-sub 9-pin
Pin No.
Signal name
Function
2
RXD
Received data
3
TXD
Transmitted data
5
GND
Signal ground
RF Generator
(D-sub 9-pin)
Control equipment
(D-sub 9-pin)
Signal
name
Pin No.
Pin No.
Signal
name
①
①
CD
RXD
②
②
RXD
TXD
③
③
TXD
④
④
DTR
GND
⑤
⑤
GND
⑥
⑥
DSR
⑦
⑦
RTS
⑧
⑧
CTS
⑨
⑨
RI
Figure 4-34 RS-232C connection example (9-pin to 9-pin)