Ulvac RFP-N - Page 68

RF POWER SUPPLY and MATCHINGBOX
4. Functions
60
RF Generator
(D-sub 9-pin)
Control equipment
(D-sub 25-pin)
Signal
name
Pin No.
Pin No.
Signal
name
①
②
TXD
RXD
②
③
RXD
TXD
③
④
RTS
④
⑤
CTS
GND
⑤
⑥
DSR
⑥
⑦
GND
⑦
⑧
CD
⑧
⑳
DTR
⑨
Figure 4-35 RS-232C connection example (9-pin to 25-pin)
Table 4-8 RS-232C mode commands
Command name
Command
Remarks
RF-ON command
RFON[CR]
Response when ON: [CR]
Response when OFF (when it could not turn ON): N[CR]
RF-OFF command
RFOFF[CR]
Response when OFF: [CR]
Response when ON (when it could not turn OFF): N[CR]
Check RF operation state
RFON? [CR]
Response when ON: 1[CR]
Response when OFF : 0[CR]
Set output power
PFSET_XXXX[CR]
Specify in watts
Response when setting reflected: [CR]
Response when setting could not be reflected: N[CR]
Check output setting power
PFSET?[CR]
Returned in watts
Response: XXXX[CR] (zero suppressed)
Read monitors
MON? [CR]
Returns Pf[W], PR[W], TUNE[%], MATCH[%], VDC[V],
VPP[V], and whether or not there is an alarm (0-1) in the
order shown below
XX,XX,XX,XX,XX,XX,XX[CR]
Zero suppressed,When VDC is negative, - is added to the
beginning of VDC[V].
Preset command
MOV_XX,XX[CR]
Specified in TUNE, MATCH order in a range between 0
and 99.
Response when command accepted: [CR]
Response when command not accepted: N[CR]
Reset
RESET[CR]
Response: [CR]
Check model/software version
ID? [CR]
Returns the model name and software version in that order.
XXXXXXXXX,XX,XX,XX[CR]
Response when command not accepted: N[CR]