Ulvac RFP-N - System Configuration

RF POWER SUPPLY and MATCHINGBOX
2. Overview
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2-3. System configuration
This system is composed of a RF generator, a control panel, and a matching box.
The system configuration is shown in "Figure 2-1/Figure 2-2 System configuration".
The basic configuration requires the equipment below.
① RF generator (RFS-****N)
② Matching box (MBX-****N)
③ Control panel (RFP-N) * Not used in external control and with built-in types.
Figure 2-1 System configuration (standalone controller type)
Figure 2-2 System configuration (built-in controller type)