RF POWER SUPPLY and MATCHINGBOX
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3-3. Matching box installation
Install the matching box according to the following procedure.
3-3-1 Matching box installation method
In order to prevent electric shock accidents, confirm that the main breaker that
generates dangerous voltages for the RF Generator and DC Generator has been shut off
and confirm that the AC Generator has been shut off before performing any installation
or removal work, and wait an addition three minutes or more after shutting them off.
Then check that there is no remaining load in the cathode, and finally perform the work.
In order to work safely, inform all related parties of the details of the work, confirm
the hazardous work (working in high locations, high voltage work) before starting the
work, and implement all measures to prevent danger. In order to reliably shutoff
hazardous energy, please use LOTO (lockout-tagout).
Ensure that the matching box connections are accurately and firmly connected.
Depending on the connection method, there may be symptoms such as unstable matching
operation, high power loss, or RF noise generation. There may also be an impact to the
process. Take note of the items below to accurately and firmly make the connections.
① The contact area for the RF output terminal connection should be made as large as
possible.
② Use a retainer plate when connecting the matching box with a thin copper plate.
③ If the power is large or a large amount current is flowing, sandwich an insulator
(Teflon sheet, etc.) in between the layers of two or three copper plates.
④ Sufficiently ground the matching box.
⑤ Locations where RF is applied may be heated by the RF and generate heat, therefore
do not use iron or SUS screws.
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