Ulvac RFP-N - Table of Contents

RF POWER SUPPLY and MATCHINGBOX
Contents
Contents
1. For Safe Operation ............................................................................................................................... 1
1-1. Precautions when handling the system ......................................................................................... 1
1-2. Warning labels/nameplate ............................................................................................................. 2
1-3. Contact information ...................................................................................................................... 2
2. Overview .............................................................................................................................................. 3
2-1. Introduction .................................................................................................................................. 3
2-2. Features ......................................................................................................................................... 3
2-3. System configuration .................................................................................................................... 4
2-4. Cooling water quality standard ..................................................................................................... 6
2-5. Individual RF Generator specifications ........................................................................................ 7
2-6. Common RF Generator specifications ........................................................................................ 11
2-7. Individual controller specifications ............................................................................................ 13
2-8. Individual matching box specifications ...................................................................................... 14
2-9. Common matching box specifications ........................................................................................ 18
3. Setup .................................................................................................................................................. 19
3-1. Checking the accessories ............................................................................................................ 19
3-2. RF generator installation ............................................................................................................. 20
3-2-1. RF generator mounting structure ......................................................................................... 21
3-2-2. RF Generator installation environment ............................................................................... 22
3-3. Matching box installation ........................................................................................................... 23
3-3-1 Matching box installation method ........................................................................................ 23
3-3-2. In the case of connector output ............................................................................................ 25
3-4. System wiring ............................................................................................................................. 27
3-4-1. Cable connections ................................................................................................................ 27
3-4-2. Input RF Generator wiring .................................................................................................. 29
3-4-3. Connecting the earth terminal.............................................................................................. 30
3-5. About the interlock ..................................................................................................................... 31
4. Functions ............................................................................................................................................ 32
4-1. Descriptions of RF generator functions ...................................................................................... 32
4-1-1. Descriptions of front panel functions .................................................................................. 32
4-1-2. Descriptions of rear panel functions .................................................................................... 33
4-1-3. Descriptions of control panel functions ............................................................................... 37
4-1-4. Descriptions of protection functions.................................................................................... 38
4-1-5. Descriptions of external control functions ........................................................................... 39
4-2. Descriptions of Matching Box .................................................................................................... 43