4-3. Descriptions of parameter functions ........................................................................................... 45
4-4. Descriptions of external control (RS-232C) functions ............................................................... 59
5. Operation ............................................................................................................................................ 62
5-1. RF Generator operating procedures ............................................................................................ 62
5-1-1. Turning on the RF Generator ............................................................................................... 62
5-1-2. Local operation method (panel operation) ........................................................................... 62
5-1-3. Remote operation (external control operation) method ....................................................... 66
5-1-4. Special commands ............................................................................................................... 68
6. Matching Adjustment ......................................................................................................................... 69
6-1. Matching adjustment overview ................................................................................................... 69
6-1-1. Matching fundamentals ....................................................................................................... 69
6-1-2. Matching adjustment ........................................................................................................... 69
6-2. Matching box internal adjustment work ..................................................................................... 71
6-2-1. Adjusting the number of coil short circuits (MBX-1305N/MBX-1310N) .......................... 72
6-2-2. Adjusting the number of coil short circuits (MBX-1330N/MBX-1350N) .......................... 73
6-2-3. Adding a fixed capacitor ...................................................................................................... 75
6-3. Matching box power derating ..................................................................................................... 76
6-3-1. MBX-1310N/MBX-1305N derating reference values ........................................................ 76
6-3-2. MBX-1330N derating reference values ............................................................................... 80
6-3-3. MBX-1350N derating reference values ............................................................................... 82
7. Maintenance ....................................................................................................................................... 84
7-1. RF Generator maintenance and inspection ................................................................................. 84
7-2. Matching box maintenance and inspection ................................................................................. 86
8. Troubleshooting ................................................................................................................................. 87
8-1. Troubleshooting .......................................................................................................................... 87
8-1-1. RF generator troubleshooting .............................................................................................. 87
8-1-2. Matching box troubleshooting ............................................................................................. 88
9. Reference Materials ........................................................................................................................... 89
CE Declaration of Conformity ........................................................................................................... 97
People's Republic of China Electronic Industry Standard SJ/T 11364 -2014 (China RoHS2) .......... 99
To Next Page
Loading...