Ulvac RFP-N - Reference Materials; System Reference Documents

RF POWER SUPPLY and MATCHINGBOX
9. Reference Materials
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9. Reference Materials
The following materials are included with this manual as a reference.
● RFP-N
Outline drawing
● RFS-1305N
Outline drawing
● RFS-1310N
Outline drawing
● RFS-1330N(built-in controller type)
Outline drawing
● RFS-1330N(standalone controller type)
Outline drawing
● RFS-1350N(built-in controller type)
Outline drawing
● RFS-1350N(standalone controller type)
Outline drawing
● MBX-1305N
Outline drawing
● MBX-1310N
Outline drawing
● MBX-1330N
Outline drawing
● MBX-1350N
Outline drawing
● CE Declaration of Conformity
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●China RoHS compliant
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