Ulvac RFP-N - Special Commands

RF POWER SUPPLY and MATCHINGBOX
5. Operation
68
5-1-4. Special commands
The following commands and functions are available for RFP-N (control panel) special
operations.
Table 5-1 Special command details
Item
Parameter details
MAINTE mode
While simultaneously pressing the "▲" and "▼" keys on the
"TLIFE screen", press the "ON" key.
Clear EXT.INTERLOCK
display
On the "EXT.INTERLOCK screen", while simultaneously
pressing the "ESC" and "ENT" keys, press the "ON" key.
Reset PANEL LOCKED
When "PANEL LOCKED" is displayed, simultaneously press the
" ", " ", and "▼" keys to reset the locked oanel.