Ulvac RFP-N - Page 75

RF POWER SUPPLY and MATCHINGBOX
5. Operation
67
RF-ON/OFF
EXT.CONT(1-2)
PRG STROBE
EXT.CONT(33-31)
ACK
EXT.CONT(42-43)
PRG SELECT
EXT.CONT
(27/28/29/30-31)
MOTO STROBE
EXT.CONT(32-31)
TUNE/MATCH
Position Monitor
EXT.CONT(44-45/46-47)
ON
OFF
CLOSE
OPEN
0V
10V
0V
10V
100msec～1sec 100msec～1sec
CLOSE
OPEN
500msec 500msec
100msec～1sec 100msec～1sec
④ Preset operation setting by program number
 On the P2 control mode selection screen, change the settings to "RFOP=ANALOG" and
"AMOP=SELECT".
 While RF is off, change the program number with the program strobe signal and input the
motor strobe signal to perform a preset operation.
 Set the one-shot signal pulse width for the program strobe signal and the motor strobe signal
to a width between 100 ms to 1 s. If the pulse is less than 100 ms or greater than 1 s, stable
operation may not be possible. We recommend using a 500 ms pulse width for the most
stable operation possible.
Figure 5-9 Control mode selection screen (P2)
R
F
O
P
=
A
N
A
L
O
G
O
S
C
=
I
N
T
A
M
O
P
=
S
E
L
E
C
T
A
D
L
Y
=
0
s
Figure 5-10 Timing chart for preset operation by program number