Ulvac RFP-N - Adjusting the Number of Coil Short Circuits (MBX-1330 N;MBX-1350 N)

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
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6-2-2. Adjusting the number of coil short circuits (MBX-1330N/MBX-1350N)
To increase or decrease the number of coil turns for the MBX-1330N and MBX-1350N, open the
matching box's maintenance panel and change the number of coil taps.
* Location to add the fixed capacitor
* Coil taps
Figure 6-3 MBX-1330N internal components diagram
Figure 6-4 MBX-1350N internal components diagram
* Location to add the fixed capacitor
* Coil taps