Ulvac RFP-N - Descriptions of Rear Panel Functions

RF POWER SUPPLY and MATCHINGBOX
4. Functions
33
① STANDBY LED
 Turns on when the RF Generator breaker is turned on and the control circuit board is
energized. Turns off when the breaker is turned off and the control circuit board is not
energized.
② RF-ON LED
 Turns green when RF output is on. Turns off when RF output is off.
③ AMC AUTO LED
 Turns green when the matching box control mode is AUTO mode. Turns off when panel
mode.
④ INTERLOCK LED
 Turns off when the interlock is active. Turns on when the interlock is released.
⑤ ALARM LED
 Turns on when an alarm occurs. Turns off when the alarm is reset.
4-1-2. Descriptions of rear panel functions
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Figure 4-4 RFS-1305N/RFS-1310N rear panel example