Ulvac RFP-N - Page 42

RF POWER SUPPLY and MATCHINGBOX
4. Functions
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① MAIN POWER switch
 The switch for supplying 200 VAC to the RF generator. The power supply is turned on
when the switch is moved to the "ON" side. The power supply is turned off when the
switch is moved to the "OFF" side. After shutting off the power, wait 30 seconds or
more supplying the power again.
② INPUT connector
 Connects the 200 VAC power input cable.
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Figure 4-5 RFS-1330N/RFS-1350N rear panel example (built-in controller type)
Figure 4-6 RFS-1330N/RFS-1350N rear panel example (built-in controller type)
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