Ulvac RFP-N - Common RF Generator Specifications

RF POWER SUPPLY and MATCHINGBOX
2. Overview
11
2-6. Common RF Generator specifications
Table 2-7 Common RF Generator specifications (protection functions)
Classification
Item
Protection operation
Protection
function
OVER_REF
Suppresses the output power when reflected wave power is too large.
OVER_POW
Suppresses the output power when the RF amplifier's input power is too
large.
OVER_VOLTAGE
Stops the output power when there is RF amplifier overvoltage.
OVER_CURRENT
Stops the output power when there is RF amplifier overcurrent.
VPP_OVER
Stops the output power when VPP voltage has exceeded the rating.
INTERLOCK
Stops the output power when the external interlock has operated.
TUNE_LIMIT
Limits the TUNE variable capacitor movement range to be within the
configured range.
MATCH_LIMIT
Limits the MATCH variable capacitor movement range to be within the
configured range.
HARD_LIMIT
Stops the output power when the variable capacitor position is less than
0% or greater than 100%.
WATER SHORTAGE
Stops the output power when the cooling water volume has dropped.
ALARM
Stops the output power when an error has occurred.