Ulvac RFP-N - Remote and Preset Operation Methods

RF POWER SUPPLY and MATCHINGBOX
5. Operation
66
100msec～1sec
100msec～1sec
RF-ON/OFF
EXT.CONT(1-2)
Power Setting
EXT.CONT(12-9)
Pf Monitor
EXT.CONT(10-9)
Motor Strobe
EXT.CONT(32-31)
TUNE/MATCH
Analog Preset
EXT.CONT(18/19-13)
TUNE/MATCH
Position Monitor
EXT.CONT(44-45/46-47)
ON
OFF
0V
0V
OPEN
CLOSE
10V
10V
0V
10V
0V
10V
5-1-3. Remote operation (external control operation) method
① Operation mode menu selection
 On the P2 control mode selection screen, change the settings to "RFOP=ANALOG" and
"AMOP=ANALOG".
 For the standalone controller type, the above settings are automatically set when the
controller is removed.
Figure 5-7 Control mode selection screen (P2)
② Output settings
 Input external command voltage via the RF generator's EXT.CONT connector.
 After the above voltage has been input, RF with the set power is output by inputting the
RF-ON command via the EXT.CONT connector. For the EXT.CONT connector pin
assignments, see "External control (EXT.CONT) pin assignments".
③ Analog preset operation setting
 The analog preset operation starts when the motor strobe signal is input as one-shot signal
input from closed to open when RF is off.
 Set the range of the pulse width of the above one-shot pulse signal between 100 ms and 1 s.
 If the pulse is less than 100 ms or greater than 1 s, stable operation may not be possible. We
recommend a 500 ms one-shot pulse signal for the most stable operation possible.

R
F
O
P
=
P
A
N
E
L
O
S
C
=
I
N
T
A
M
O
P
=
P
A
N
E
L
A
D
L
Y
=
0
s
Figure 5-8 Analog preset operation timing chart