RF POWER SUPPLY and MATCHINGBOX
13
Table 2-9 Common RF Generator specifications (WARNING)
Warning occurrence conditions
When a power loss was detected.
When the fan speed of the generator has fallen below the set value.
When the fan speed of the matching box has fallen below the set value.
When the circuit board temperature inside the RF generator has increased.
When there have been no operations for a certain amount of time when the panel lock
is enabled.
When a flow rate of 8 l/min or greater has continued for 30 seconds or longer.
* When a warning occurs, RF output continues and the warning name flashes on the display screen.
* When the cause of the warning goes away, the warning name display disappears.
2-7. Individual controller specifications
Table 2-10 RFP-N specifications
12 VDC (supplied from the RF generator)
Operated by push-button switches
Operating environment temperature
10°C to 40°C (install in a well ventilated location)
Operating environment humidity
15% to 85% RH (no condensation)
Avoid direct sunlight, heat, dust, and vibrations
Pollution degree 2
(No corrosive or flammable gases, no contact with water, oils, or chemicals)
Secure by rack mount ears (detachable)
240 W x 30 D x 100 H or less (excluding protrusions)
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