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Ulvac RFP-N - Adjusting the Number of Coil Short Circuits (MBX-1305 N;MBX-1310 N)

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RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
72
6-2-1. Adjusting the number of coil short circuits (MBX-1305N/MBX-1310N)
To increase or decrease the number of coil turns for the MBX-1305N and MBX-1310N, open the
matching box's maintenance panel and replace the coil.
For the replacement coil, see "MBX-1305N/MBX-1310N coils" below.
The plate to add a fixed capacitor is an option that is sold separately.
For ordering, contact ULVAC using the contact information listed on the last page.
Table 6-2 MBX-1305N/MBX-1310N coils
Coil model
Specification
Manufacturer
ERU-1310N-0T
Coil all turns shorted
ULVAC
ERU-1310N-1T
1-turn coil
ULVAC
ERU-1310N-2T
2-turn coil
ULVAC
ERU-1310N-3T
3-turn coil
ULVAC
ERU-1310N-4T
4-turn coil
ULVAC
ERU-1310N-5T
5-turn coil
ULVAC
ERU-1310N-6T
6-turn coil
ULVAC
ERU-1310N-7T
7-turn coil
ULVAC
ERU-1310N-8T
8-turn coil
ULVAC
ERU-1310N-9T
9-turn coil
ULVAC
Table 6-3 MBX-1305N/MBX-1310N supplementary capacitor
Capacitor model
Capacitance
Withstand voltage
(13.56 MHz)
Withstand current
(13.56 MHz)
Manufacturer
SCF-151Z
100pF
9 kVp
50 Arms
Meidensha
SCF-152Z
200pF
9 kVp
50 Arms
Meidensha
SCF-53Z
300pF
3 kVp
50 Arms
Meidensha
SCF-54Z
400pF
3 kVp
50 Arms
Meidensha
SCF-55Z
500pF
3 kVp
50 Arms
Meidensha
* Fixed capacitor
* The mounting plate is an option
* Coil
Figure 6-2 MBX-1305N/MBX-1310N internal components diagram

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