Ulvac RFP-N - Power Derating Tables

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
76
6-3. Matching box power derating
There is an anticipated load current and voltage depending on the matching point. The maximum
power that can be safely used is limited based on this, so use the power derating tables below as a
guide.
* The unit in the derating tables is [W].
The deratings below are reference values. Use the matching box under conditions in the actual usage
environment where it will not exceed the rated voltage, rated current, and usage temperature range.
* When using the matching box in a manner that exceeds the deratings below, the matching box may
be damaged due to the abnormal generation of internal heat or due to arcing caused by insulation
breakdown.
6-3-1. MBX-1310N/MBX-1305N derating reference values
Table 6-5 MBX-1310N/MBX-1305N - Coil all turns shorted
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 760 520 360 250
90% 1000 1000 1000 1000 1000 1000 1000 750 520 360 250
80% 1000 1000 1000 1000 1000 1000 1000 750 510 350 250
70% 1000 1000 1000 1000 1000 1000 1000 740 500 350 250
60% 1000 1000 1000 1000 1000 1000 1000 730 500 340 240
50% 1000 1000 1000 1000 1000 1000 1000 710 490 340 240
40% 1000 1000 1000 1000 1000 1000 1000 690 470 330 230
30% 1000 1000 1000 1000 1000 1000 980 670 460 310 230
20% 1000 1000 1000 1000 1000 1000 930 630 430 300 210
10% 1000 1000 1000 1000 1000 780 540 380 260 190 140
00% 1000 1000 1000 810 540 360 250 170 120 80 60
TUNE
MATCH
MBX-1305N/MBX-1310N-(0T)
Table 6-6 MBX-1310N/MBX-1305N coils - 1-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 860 640 500
90% 1000 1000 1000 1000 1000 1000 1000 1000 860 640 500
80% 1000 1000 1000 1000 1000 1000 1000 1000 850 630 490
70% 1000 1000 1000 1000 1000 1000 1000 1000 840 620 480
60% 1000 1000 1000 1000 1000 1000 1000 1000 820 610 480
50% 1000 1000 1000 1000 1000 1000 1000 1000 810 600 470
40% 1000 1000 1000 1000 1000 1000 1000 1000 780 580 450
30% 1000 1000 1000 1000 1000 1000 1000 1000 760 560 440
20% 1000 1000 1000 1000 1000 1000 1000 970 720 530 410
10% 1000 1000 1000 1000 1000 1000 860 640 480 370 290
00% 1000 1000 1000 1000 740 520 380 280 210 160 120
TUNE
MATCH
MBX-1305N/MBX-1310N-(1T)