Ulvac RFP-N - Page 85

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
77
Table 6-7 MBX-1310N/MBX-1305N coils - 2-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
90% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
80% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
70% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
60% 1000 1000 1000 1000 1000 1000 1000 1000 730 530 390
50% 1000 1000 1000 1000 1000 1000 1000 1000 720 520 390
40% 1000 1000 1000 1000 1000 1000 1000 970 700 500 380
30% 1000 1000 1000 1000 1000 1000 1000 930 670 490 370
20% 1000 1000 1000 1000 1000 1000 1000 890 630 460 350
10% 1000 1000 1000 1000 1000 1000 980 690 490 360 270
00% 1000 1000 1000 1000 840 580 410 300 220 160 120
TUNE
MATCH
MBX-1305N/MBX-1310N-(2T)
Table 6-8 MBX-1310N/MBX-1305N coils - 3-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
90% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
80% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
70% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
60% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
50% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
40% 1000 1000 1000 1000 1000 1000 1000 1000 730 530 390
30% 1000 1000 1000 1000 1000 1000 1000 980 700 510 380
20% 1000 1000 1000 1000 1000 1000 1000 930 660 480 360
10% 1000 1000 1000 1000 1000 1000 980 690 490 360 270
00% 1000 1000 1000 1000 1000 680 470 330 240 170 130
TUNE
MATCH
MBX-1305N/MBX-1310N-(3T)
Table 6-9 MBX-1310N/MBX-1305N coils - 4-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
90% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
80% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
70% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
60% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
50% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
40% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
30% 1000 1000 1000 1000 1000 1000 1000 1000 740 530 390
20% 1000 1000 1000 1000 1000 1000 1000 980 700 510 380
10% 1000 1000 1000 1000 1000 1000 980 690 490 360 270
00% 1000 1000 1000 1000 1000 680 470 330 240 170 130
TUNE
MATCH
MBX-1305N/MBX-1310N-(4T)
Table 6-10 MBX-1310N/MBX-1305N coils - 5-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
90% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
80% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
70% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
60% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
50% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
40% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
30% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
20% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
10% 1000 1000 1000 1000 1000 1000 1000 950 720 550 430
00% 1000 1000 1000 1000 1000 860 620 450 340 260 210
TUNE
MATCH
MBX-1305N/MBX-1310N-(5T)