Ulvac RFP-N - Page 86

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
78
Table 6-11 MBX-1310N/MBX-1305N coils - 6-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
90% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
80% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
70% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
60% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
50% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
40% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
30% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
20% 1000 1000 1000 1000 1000 1000 1000 1000 1000 830 650
10% 1000 1000 1000 1000 1000 1000 1000 950 720 550 430
00% 1000 1000 1000 1000 1000 860 620 450 340 260 210
TUNE
MATCH
MBX-1305N/MBX-1310N-(6T)
Table 6-12 MBX-1310N/MBX-1305N coils - 7-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 1000 1000 810 590 450 350
90% 1000 1000 1000 1000 1000 1000 1000 850 620 470 370
80% 1000 1000 1000 1000 1000 1000 1000 910 670 500 390
70% 1000 1000 1000 1000 1000 1000 1000 990 730 550 430
60% 1000 1000 1000 1000 1000 1000 1000 1000 810 610 480
50% 1000 1000 1000 1000 1000 1000 1000 1000 950 710 550
40% 1000 1000 1000 1000 1000 1000 1000 1000 1000 870 680
30% 1000 1000 1000 1000 1000 1000 1000 1000 1000 870 690
20% 1000 1000 1000 1000 1000 1000 1000 1000 1000 870 690
10% 1000 1000 1000 1000 1000 1000 1000 990 750 570 460
00% 1000 1000 1000 1000 1000 880 640 470 360 280 220
TUNE
MATCH
MBX-1305N/MBX-1310N-(7T)
Table 6-13 MBX-1310N/MBX-1305N coils - 8-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 1000 940 650 470 350 270 210
90% 1000 1000 1000 1000 1000 970 680 490 360 280 220
80% 1000 1000 1000 1000 1000 1000 720 520 380 290 230
70% 1000 1000 1000 1000 1000 1000 760 550 410 310 250
60% 1000 1000 1000 1000 1000 1000 830 600 440 340 270
50% 1000 1000 1000 1000 1000 1000 930 670 490 370 290
40% 1000 1000 1000 1000 1000 1000 1000 780 570 430 340
30% 1000 1000 1000 1000 1000 1000 1000 980 720 540 430
20% 1000 1000 1000 1000 1000 1000 1000 1000 950 720 570
10% 1000 1000 1000 1000 1000 1000 1000 1000 780 600 480
00% 1000 1000 1000 1000 1000 920 660 490 370 290 230
TUNE
MATCH
MBX-1305N/MBX-1310N-(8T)
Table 6-14 MBX-1310N/MBX-1305N coils - 9-turn coil
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 1000 1000 1000 1000 690 470 330 240 180 140 110
90% 1000 1000 1000 1000 710 480 340 250 190 140 110
80% 1000 1000 1000 1000 730 500 350 260 190 150 120
70% 1000 1000 1000 1000 770 520 370 270 200 150 120
60% 1000 1000 1000 1000 810 550 390 280 210 160 130
50% 1000 1000 1000 1000 880 590 420 300 230 170 140
40% 1000 1000 1000 1000 980 660 460 340 250 190 150
30% 1000 1000 1000 1000 1000 770 540 390 290 220 180
20% 1000 1000 1000 1000 1000 990 690 500 370 280 220
10% 1000 1000 1000 1000 1000 1000 980 720 540 410 320
00% 1000 1000 1000 1000 1000 920 660 490 370 290 230
TUNE
MATCH
MBX-1305N/MBX-1310N-(9T)