Ulvac RFP-N - System Operation; RF Generator Startup and Local Operation

RF POWER SUPPLY and MATCHINGBOX
5. Operation
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5. Operation
5-1. RF Generator operating procedures
5-1-1. Turning on the RF Generator
Before energizing the system, check that the cables between each unit are correctly wired, and
then turn on the main breaker for the RF generator. If there are no problems, the main screen is
displayed on the panel. When the breaker is turned on, the current time configuration screen may
be displayed. If the breaker is off (unpowered state) for two or more weeks, the current time
configuration screen is displayed.
Figure 5-1 Main screen (P1)
5-1-2. Local operation method (panel operation)
① Operation mode menu selection
 Press the " " key a number of times to display the below control mode selection screen.
Figure 5-2 Control mode selection screen (P2)
P
f
=
0
W
/
0
W
P
r
=
0
W
A
M
C
=
A
U
T
O
V
D
C
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0
V
T
=
5
0
%
V
P
P
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0
V
M
=
5
0
%
R
F
O
P
=
A
N
A
L
O
G
O
S
C
=
I
N
T
A
M
O
P
=
A
N
A
L
O
G
A
D
L
Y
=
0
s