Ulvac RFP-N - Individual Matching Box Specifications

RF POWER SUPPLY and MATCHINGBOX
2. Overview
14
2-8. Individual matching box specifications
Table 2-11 MBX-1305N specifications
Classification
Item
Specification value
MBX-1305N
Supply power
Rated input
voltage/current
24 VDC/3 A max (supplied from the RF generator)
RF input
Frequency
13.56 MHz ± 0.05%
Rated power
30 W or higher, 500 W or less
Input impedance
50 Ω (when matching)
Input connector
N-type receptacle
RF output
Permissible
output voltage
① 2500 Vpp (option: 5000 Vpp)
② 2500 Vdc
Permissible
output current
30 A or lower (restricted by the permissible current of the coil)
RF output electrode
Copper plate: t3.0-40 (4-M4)
The area around the output electrode is not cooled.
If it reaches high temperatures, cool it to 120°C or lower.
Options
7/16 DIN receptacle
HN-type receptacle
Matching accuracy
Residual reflected
wave power
10 W or lower when matching or a value 0.3% or lower of input
traveling wave power, whichever is greater.
Variable capacitors
Variable capacitor
capacitance
TUNE: 1500 pF/MATCH: 500 pF
Coil
Adjustment method
Change inductance by replacing the coil
Standard coil
5 turns
Cooling
Cooling method
Forced air cooling by fan
Operating environment temperature
10°C to 40°C (install in a well ventilated location)
Operating environment humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2
No corrosive or flammable gases, no contact with water, oils, or
chemicals
Exterior
External dimensions
375W-250D-120H (excluding protrusions)
Weight
Approx. 8 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Power derating is required for the rated power according to the matching point.
* See "Power derating" in this manual.