Ulvac RFP-N - System Setup; Accessory Check and RF Generator Installation

RF POWER SUPPLY and MATCHINGBOX
3. Setup
19
3. Setup
This chapter describes the necessary setup and precautions from
when the product is delivered up until it is ready to be used.
3-1. Checking the accessories
Table 3-1 RFS-1305N/RFS-1310N standard accessories
Name
Remarks
Quantity
1. AC input cable
Single-phase 200 V, 5 m
User terminal unprepared
(Black_1: Black_2) 15 AWG
1
2. External control connector
D-sub 50 female
Connector model: DD-50SF-N:JAE
This accessory is shorted between pin 16 and 17
1
Table 3-2 MBX-1305N/RFS-1310N standard accessories
Name
Remarks
Quantity
1.ERU-1310N-1T
1-turn coil
1
2.ERU-1310N-3T
3-turn coil
1
3.ERU-1310N-7T
7-turn coil
1
Table 3-3 RFS-1330N/RFS-1350N standard accessories
Name
Remarks
Quantity
1. AC input cable
Three-phase 200 V, 5 m
User terminal unprepared
(Black_1: Black_2: Black_3: Yellow/green) 10 AWG
1
2. External control connector
D-sub 50 female
Connector model: DD-50SF-N:JAE
This accessory is shorted between pin 16 and 17
1