Ulvac RFP-N - Descriptions of External Control Functions

RF POWER SUPPLY and MATCHINGBOX
4. Functions
39
4-1-5. Descriptions of external control functions
Table 4-3 External control (EXT.CONT) pin assignments
Pin No
Name
Overview
IO
1-2(COM)
RF-ON command
CLOSE: RF-ON
DI
3-4(E)
RF-ON response
RF-ON: CLOSE
DO
5-6(E)
Interlock response
When interlock/alarm: OPEN
DO
7-8(E)
ALARM signal
Alarm: CLOSE
DO
9・13・45・47
ANALOG-GND
Analog I/O GND
-
10
Pf monitor
0 V to 10 V: 0 W to rated traveling wave power
AO
11
PR monitor
0 V to 10 V: 0 W to rated reflected wave power
AO
12
External power setting
0.1 V to 10 V: 0 W to rated traveling wave power
AI
14
VDC monitor
0 V to 10 V: 0 V to rated VDC voltage
AO
15
VPP monitor
0 V to 10 V: 0 V to rated VPP voltage
AO
16-17(COM)
External interlock input
CLOSE: Release the interlock
DI
18
TUNE analog preset
0.1 V to 10 V: 0% to 99%
AI
19
MATCH analog preset
0.1 V to 10 V: 0% to 99%
AI
20-21(E)
Standby signal
Receiving power state: CLOSE
DO
22-23(COM)
Reset signal
CLOSE: Reset ALARM (CLOSE while RF-ON: RF-OFF)
DI
26-25(COM)
TUNE limit
TUNE variable capacitor position upper/lower limit: CLOSE
DO
27
Program select signal 0
LSB0 (Short 27-31: H / OPEN: L)
DI
28
Program select signal 1
LSB1 (Short 28-31: H / OPEN: L)
DI
29
Program select signal 2
LSB2 (Short 29-31: H / OPEN: L)
DI
30
Program select signal 3
LSB3 (Short 30-31: H / OPEN: L)
DI
31(COM)
Program signal common
Signal common for 27 to 30 and 32 to 33
-
32
Motor strobe signal
CLOSE: Start variable capacitor preset operation
DI
33
Program strobe signal
CLOSE: Change to program select number
DI
35-34(COM)
Switch AUTO/MANUAL
OPEN: AMC=AUTO/CLOSE: AMC=MANUAL
DI
36-37(E)
Manual response
AMC=AUTO: OPEN/ AMC=MANUAL: CLOSE:
DO
38-39(E)
MATCH limit
MATCH variable capacitor position upper/lower limit: CLOSE
DO
40-41(E)
BUSY signal
When motor driven: CLOSE
DO
42-43(E)
ACK signal
When program number updated: CLOSE
DO
44
TUNE monitor
0% to 99%: 0 V to 10 V
AO
46
MATCH monitor
0% to 99%: 0 V to 10 V
AO
48-49(E)
Preset complete signal
When preset completed: CLOSE (500 ms)
DO
50-49(E)
ARC signal
When arc detected: CLOSE (100 ms)
DO
* (E) indicates the emitter output, (COM) is the frame ground.