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Ulvac RFS-1330N User Manual

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High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Table of Contents

Questions and Answers:

Ulvac RFS-1330N Specifications

General IconGeneral
BrandUlvac
ModelRFS-1330N
CategoryPower Supply
LanguageEnglish

Summary

For Safe Operation

Precautions when handling the system

Safety precautions for system operation, including electrical hazards and handling.

Overview

RF Generator Specifications

Detailed technical specifications for individual RF generator models.

Setup

RF Generator Installation

Procedures and precautions for installing the RF generator.

Matching Box Installation

Procedures and precautions for installing the matching box.

Functions

Operation

RF Generator Operating Procedures

Step-by-step procedures for operating the RF generator.

Matching Adjustment

Troubleshooting

Troubleshooting

General troubleshooting steps for identifying and resolving system problems.

RF Generator Troubleshooting

A list of common RF generator problems and their potential causes.

Matching Box Troubleshooting

A list of common matching box problems and their potential causes.

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