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Ulvac RFS-1330N - User Manual

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RF0040E-18
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High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

Table of Contents

Questions and Answers

  • K
    klucasAug 6, 2025
    Why is the screen blank on my Ulvac RFS-1330N even when it's turned on?
    • K
      Kenneth ChanAug 6, 2025
      The screen might be blank on your Ulvac Power Supply because the required voltage has not been applied. Ensure that the correct voltage is supplied to the device.
  • F
    frank71Aug 10, 2025
    What to do if RF-ON is red but there is no output on my Ulvac Power Supply?
    • A
      Amanda EstradaAug 10, 2025
      If the RF-ON indicator is red but there's no output from your Ulvac Power Supply, it could be due to several reasons: if set to external control, the external command voltage may not be supplied; the output setting might be at 0 W; or if the OSC setting is EXT, there might be no OSC signal input. Ensure that external command voltage is supplied, adjust the output setting above 0 W, and provide an OSC signal when set to EXT.
  • M
    Mercedes WolfeAug 14, 2025
    Why does my Ulvac RFS-1330N Power Supply show a "DC SOURCE FAIL" alarm when turned on?
    • D
      Darius FletcherAug 14, 2025
      The "DC SOURCE FAIL" alarm on your Ulvac Power Supply indicates that the required voltage has not been applied, or there may be internal component damage. Check the applied voltage and inspect the device for any signs of internal damage.
  • A
    Alexander KellyAug 19, 2025
    Why isn't the output reaching the set value when RF-ON is red on my Ulvac RFS-1330N?
    • L
      Lori HendersonSep 12, 2025
      If RF-ON is red but the output doesn't reach the set value on your Ulvac Power Supply, it could be due to internal element damage within the RF Generator, a drop in external command voltage (if set to external control), or a matching issue. Check for internal element damage, monitor the external command voltage, and ensure that matching is achieved.
  • T
    Todd MooreAug 23, 2025
    How to fix "INTERLOCK" display and RF not turning on issue on Ulvac Power Supply?
    • M
      Misty WilsonAug 23, 2025
      If your Ulvac Power Supply displays "INTERLOCK" and the RF won't turn on, it means that pins 16 and 17 of the external control connector ("EXT.CONT") are not short-circuited, or the matching box interlock hasn't been released. Check the short circuit of pins 16 and 17 and release the matching box interlock.
  • I
    Isaiah BurnsAug 27, 2025
    What to do if RF won't turn on after resetting the interlock and alarm on my Ulvac RFS-1330N Power Supply?
    • R
      Ronnie WeeksAug 27, 2025
      If you've reset the interlock and alarm on your Ulvac Power Supply, but the RF still won't turn on, it may be because you're not in the correct mode for external control or panel operation of RF-ON/RF-OFF. Alternatively, there could be damage to an internal component. Ensure that the correct mode is selected and check for any internal component damage.
  • G
    glennparkerAug 31, 2025
    Why is the control panel text garbled on my Ulvac RFS-1330N Power Supply?
    • B
      Brian ThomasSep 1, 2025
      If the text on your Ulvac Power Supply's control panel is garbled, it might be due to noise. Try turning the breaker off and on to see if the issue resolves.

Summary

For Safe Operation

Precautions when handling the system

Safety precautions for system operation, including electrical hazards and handling.

Overview

RF Generator Specifications

Detailed technical specifications for individual RF generator models.

Setup

RF Generator Installation

Procedures and precautions for installing the RF generator.

Matching Box Installation

Procedures and precautions for installing the matching box.

Functions

Operation

RF Generator Operating Procedures

Step-by-step procedures for operating the RF generator.

Matching Adjustment

Troubleshooting

Troubleshooting

General troubleshooting steps for identifying and resolving system problems.

RF Generator Troubleshooting

A list of common RF generator problems and their potential causes.

Matching Box Troubleshooting

A list of common matching box problems and their potential causes.

Ulvac RFS-1330N Specifications

General IconGeneral
BrandUlvac
ModelRFS-1330N
CategoryPower Supply
LanguageEnglish

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