Ulvac RFP-N - Page 20

RF POWER SUPPLY and MATCHINGBOX
2. Overview
12
Table 2-8 Common RF Generator specifications (ALARM)
Alarm name
Alarm occurrence conditions
EXT.INTER LOCK
When the external interlock was disengaged while RF-ON.
RF COVER OPEN
When the coaxial connector cover was removed while RF-ON.
MBX COVER OPEN
When the matching box interlock was disengaged while RF-ON.
RF FAN TOO SLOW
When the fan speed of the generator has fallen.
MBX FAN TOO SLOW
When the fan speed of the matching box has fallen.
RF AMP OVER HEAT
When AMP section overheating was detected.
MBX VPP OVER
When matching box VPP detection has exceeded the set value.
RF VOLTAGE OVER
When the RF amplifier input voltage becomes too large.
RF CURRENT OVER
When the RF amplifier section experiences overcurrent.
ARC ERROR
When the ARC detection count has exceeded the set count.
CPU BOAD ERROR
An error was detected on the CPU circuit board.
RF BOAD ERROR
An error was detected on the AMP section circuit board.
OSC ERROR
When the OSC signal cannot be detected during RF-ON.
MBX HARD LIMIT
When the variable capacitor position is less than 0% or greater than 100%.
PR OVER
When the set time has elapsed in the state where PR has exceeded the set value.
PF OUT OF RANGE
When the set time has elapsed in the state where Pf has exceeded the set value.
CONT PANEL REMOVED
By a panel operation when the panel has been removed during RF-ON.
DC SOURCE ERROR
When an error has occurred in the AC/DC unit.
AMP DRIVER ERROR
When an error has occurred in the RF amplifier unit section.
BOARD TEMP OVER
When the circuit board temperature inside the RF generator has increased.
RF ON BREAK
When RF-ON was performed but RF-ON did not turn on in the hardware.
RF OUT OF RANGE(V)
When the RF amplifier section overvoltage state has continued.
RF OUT OF RANGE(C)
When the RF amplifier section overcurrent state has continued.
RF OUT OF RANGE(D)
When the chopper overcurrent state has continued.
RF OUT OF RANGE(P)
When the state has continued where the Pf output is lower than the setting value.
PF SET OVER LIMIT
When a setting was configured that exceeds the POWER_LIMIT setting value.
WATER SHORTAGE
When the cooling water volume is insufficient.
CONTROL ABORT
When the Pf output setting value is 10 W or higher and the output is less than 5 W.
AC VOLTAGE DROP
When the breaker is turned off.
VC UNIT ERROR
When abnormality is detected by variable capacitor and motor control.
FBUS BOARD ERROR
When the FBUS board communication is not established inside the power supply
FBUS DISCONNECTION
When FBUS communication is not established during RF-ON
CRC ERROR
When parameters cannot be saved or read normally.
* When an alarm occurs, RF output is turned off, and the alarm name is displayed on the controller.
* The alarm is cleared by removing the cause of the alarm and resetting.