Ulvac RFP-N - Page 73

RF POWER SUPPLY and MATCHINGBOX
5. Operation
65
④ RF-ON operation
 Press the "ON" key to start RF output. The Pf monitor value converges to within ±1 W of
the Pf setting value by feedback control. If this value does not converge to within ±1 W of
the Pf setting value, the cause may be an increase in reflected wave power, arc shutoff
operation, or another droop operation.
 While RF-ON, the VDC and VPP voltages detected at the matching box output section are
displayed.
 When matching is achieved, the Pr monitor value roughly converges to around 0 W.
 After matching is complete, check whether or not the plasma has actually ignited. If the
plasma has not ignited, you must a review the causes such as gas pressure, cathode shorting,
preset point, or other issue.
Figure 5-6 Main screen - When RF-ON (P1)
P
f
=
1
0
0
W
/
1
0
0
W
～
P
r
=
1
0
W
A
M
C
=
A
U
T
O
V
D
C
=
5
0
V
T
=
6
0
%
V
P
P
=
1
0
0
V
M
=
3
0
%
Pf monitor value Pr monitor value VDC monitor value VPP monitor value Displayed when RFON
TUNE monitor value MATCH monitor value