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③ RF-OUTPUT connector
The RF output connector. Connect this connector to the matching box. If the interlock
cover is not correctly attached, the interlock will operate and RF cannot be output.
④ AMC connector
The communication connector to connect to the matching box with the AMC-N cable.
⑤ OSC connector
The external oscillator signal input connector. Connect a function generator or other
equipment.
⑥ EXT.CONT connector
The connector for the analog control signal to connect to equipment when performing
external control. Input the RF-ON/OFF signal from the equipment.
* Connect the included JAE DD-50SF-N or an equivalent product.
* Set screw: M2.6
⑦ FG
The protective ground terminal for the RF Generator.
(M5 stud bolt)
⑧ Panel connector
The communication connector to connect the control panel with the CONT-N cable.
⑨ RS-232C connector
The connector for the RS-232C remote control signal. The RF Generator can be
controlled and monitored from equipment using the RS-232C I/F.
* The RF generator receptacle-side connector is DDK: 17JE-23090-02(D1).
* Set screw: M2.6
⑩ Serial number sticker
Lists the model and serial number. When making an inquiry, please inform the
representative of this information.
⑪ Cooling water INLET joint
The cooling water supply joint.
* Rc1/4 (PT1/4) female connector