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RF POWER SUPPLY and MATCHINGBOX
4. Functions
35
RF-OUTPUT connector
The RF output connector. Connect this connector to the matching box. If the interlock
cover is not correctly attached, the interlock will operate and RF cannot be output.
AMC connector
The communication connector to connect to the matching box with the AMC-N cable.
OSC connector
The external oscillator signal input connector. Connect a function generator or other
equipment.
EXT.CONT connector
The connector for the analog control signal to connect to equipment when performing
external control. Input the RF-ON/OFF signal from the equipment.
* Connect the included JAE DD-50SF-N or an equivalent product.
* Set screw: M2.6
FG
The protective ground terminal for the RF Generator.
(M5 stud bolt)
Panel connector
The communication connector to connect the control panel with the CONT-N cable.
RS-232C connector
The connector for the RS-232C remote control signal. The RF Generator can be
controlled and monitored from equipment using the RS-232C I/F.
* The RF generator receptacle-side connector is DDK: 17JE-23090-02(D1).
* Set screw: M2.6
Serial number sticker
Lists the model and serial number. When making an inquiry, please inform the
representative of this information.
Cooling water INLET joint
The cooling water supply joint.
* Rc1/4 (PT1/4) female connector

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