Ulvac RFP-N - Page 82

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
74
 The number of coils taps is counted from right to left as 1 tap, 2 taps, 3 taps, and so on. The L
value increases with each increase in the number of taps.
 The number of taps can be changed in six types, from tap 1 to tap 6.
Table 6-4 MBX-1330N/MBX-1350N supplementary capacitor
Capacitor model
Capacitance
Withstand voltage
(13.56 MHz)
Withstand current
(13.56 MHz)
Manufacturer
SCF-151Z
100 pF
9 kVp
50 Arms
Meidensha
SCF-152Z
200 pF
9 kVp
50 Arms
Meidensha
SCF-53Z
300 pF
3 kVp
50 Arms
Meidensha
SCF-54Z
400 pF
3 kVp
50 Arms
Meidensha
SCF-55Z
500 pF
3 kVp
50 Arms
Meidensha