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Ulvac RFP-N - Page 13

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RF POWER SUPPLY and MATCHINGBOX
2. Overview
5
Table 2-1 Details on the system configuration diagram codes
Wiring diagram code
Supported model
Remarks
RFS-****N
RFS-1305N
13.56 MHz/500 W RF Generator
RFS-1310N
13.56 MHz/1000 W RF Generator
RFS-1330N
13.56 MHz/3000 W RF Generator
RFS-1350N
13.56 MHz/5000 W RF Generator
MBX-****N
MBX-1305N
13.56 MHz/500 W matching box
MBX-1310N
13.56 MHz/1000 W matching box
MBX-1330N
13.56 MHz/3000 W matching box
MBX-1350N
13.56 MHz/5000 W matching box
AC**-N
AC01-N
Use for RFS-1305N/ RFS-1310N
AC05-N
Use for RFS-1330N/ RFS-1350N
RF**-N
RF01-N
Use for RFS-1305N/ RFS-1310N
RF03-N
Use for RFS-1330N
RF05-N
Use for RFS-1350N

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