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① AMC connector
The communication connector to connect to the RF generator with the AMC-N cable.
② RF-INPUT connector
The RF output connector. Connect this connector to the RF generator. If the interlock
cover is not correctly attached, the interlock will operate and RF cannot be output.
③ Cooling water OUTLET joint
The cooling water discharge joint..
* Rc3/8 (PT3/8) female connector
④ Cooling water INLET joint
The cooling water supply joint.
* Rc3/8 (PT3/8) female connector
⑤ FG
he protective ground terminal for the Matching Box..
*M5-10
⑥ RF output electrode
Bus bar for introducing the RF power to the load. For details, refer to "9 References"
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