Ulvac RFP-N - Page 54

RF POWER SUPPLY and MATCHINGBOX
4. Functions
46
R
F
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Figure 4-16 Operation mode selection screen (P2)
Item
Parameter details
RFOP
Sets the RF generator operation method.
PANEL: Operates from the control panel.
ANALOG: Operates from the EXT.CONT connector.
SERIAL: Not normally used.
EXT.ON: ON/OFF operation is performed from the EXT.CONT connector, and
the POWER setting is configured from the control panel.
FBUS: Not normally used.
OSC
Selects the oscillation source.
INT: Uses the internal quartz oscillator.
EXT: Uses an external oscillation source. (EXO-13, PHS-24N, etc.)
AMOP
Sets the matching box operation method.
PANEL: Operates from the control panel.
ANALOG: Operates from the EXT.CONT connector. (Analog preset method)
SELECT: Operates from the EXT.CONT connector. (Program preset method)
SERIAL: Not normally used.
FBUS: Not normally used.
ADLY
Sets the delay time until auto matching starts after RF is turned on.
RDT
After the auto matching operation completes one time, it will not start again for
the period of this set time.
CPr
CPr=ON: Continues the auto matching operation by the impedance sensor at a
very slow speed after matching has been judged by the reflected wave.
CPr=OFF: The auto matching operation completes with the matching judgment
by the reflected wave.
* This setting is invalid when MPr=OFF.