Ulvac RFP-N - Page 55

RF POWER SUPPLY and MATCHINGBOX
4. Functions
47
L
H
T
=
9
9
%
L
H
M
=
9
9
%
T
5
0
%
L
L
T
=
0
%
L
L
M
=
0
%
M
5
0
%
P
T
=
5
0
%
P
M
=
5
0
%
M
P
S
P
S
C
N
T
=
0
0
0
0
0
0
0
0
P
R
G
0
Figure 4-17 Variable capacitor limit configuration screen (P3)
Item
Parameter details
LHT
Sets the TUNE variable capacitor upper limit.
LHM
Sets the MATCH variable capacitor upper limit.
LLT
Sets the TUNE variable capacitor lower limit.
LLM
Sets the MATCH variable capacitor lower limit.
PT
Sets the TUNE variable capacitor preset point.
PM
Sets the MATCH variable capacitor preset point.
MPS
Performs a manual preset.Press the "ENT" button to perform the preset
operation when the setting is ON.
PSCNT
Displays the number of presets.
PRG
Sets the program number.
T
Displays the current position of the TUNE variable capacitor.
M
Displays the current position of the MATCH variable capacitor.
T
L
I
F
E
=
0
k
W
h
r
R
F
O
N
=
0
H
r
M
A
I
N
T
E
Figure 4-18 Target life screen (P4)
Item
Parameter details
TLIFE
Displays the accumulated output power.
Use this for the target replacement cycle.
RFON
Displays the accumulated RF on time.
MAINTE
Displayed when in maintenance mode.