Ulvac RFP-N - Page 56

RF POWER SUPPLY and MATCHINGBOX
4. Functions
48
M
P
r
=
O
F
F
S
S
T
=
0
.
0
s
Figure 4-19 Soft start configuration screen (P5)
Item
Parameter details
MPr
Turn on to use the Pr value in the auto matching complete judgment.
OFF: Determined by and matching sensor.
ON: Determined by the reflected wave.
AND: Determined by the reflected wave and matching sensor.
SST
Sets the soft start time.
Set the rise time until the set output when RF-ON.
A
S
T
O
P
=
2
5
u
s
T
0
A
M
A
S
K
=
2
0
0
u
s
A
S
r
=
3
0
W
A
S
D
L
Y
=
1
s
A
R
r
=
1
0
W
A
C
N
T
=
0
Figure 4-20 Arc shutoff operation configuration screen (P6)
Item
Parameter details
ASTOP
Sets the Pf shutoff time at arc detection.
AMASK
The Pf shutoff operation is not performed for this set time after recovering
from arc shutoff.
Set this to 200 μs or higher.
ASr
Performs the Pf shutoff operation when reflected wave power rapidly
becomes the set value or higher.
We recommend the setting value be 50% of the rated reflected wave power or
higher.
ARr
The Pf shutoff operation is valid when the reflected wave power becomes this
setting value or lower.
We recommend the setting value be 20% to 50% of the rated reflected wave
power.
ASDLY
Sets the time until the arc shutoff function is enabled after RF-ON.
ACNT
Outputs the alarm when the arc shutoff count is the set count or higher.
This function is disabled when ACNT=0.
T
Displays the accumulated arc shutoff operation count.