Ulvac RFP-N - Page 57

RF POWER SUPPLY and MATCHINGBOX
4. Functions
49
A
S
r
2
=
1
5
0
W
A
S
r
3
=
4
0
0
W
Figure 4-21 Arc shutoff operation configuration screen (P7)
Item
Parameter details
ASr2
Performs the arc cut operation when a reflected wave of "rated reflected wave
+ ASr2" is exceeded within the set time in ASDLY or after arc shutoff, even
when a reflected wave of the value set in ASr or greater occurs.
ASr3
When this setting value is exceeded in the instant of output recovery
immediately after the arc shutoff operation, perform the arc shutoff operation
regardless of the AMASK or other setting.
P
r
O
L
=
1
0
0
W
V
p
O
L
=
1
0
0
%
P
r
O
T
=
3
0
s
P
r
0
M
=
5
s
P
L
=
1
0
0
%
0
Figure 4-22 Limit configuration screen (P8)
Item
Parameter details
PrOL
Excessive reflected wave level threshold setting.
VpOL
Excessive VPP alarm level threshold setting.
Alarm when VPP voltage is detected that exceeds the setting value for the
rated VPP voltage.
PrOT
An alarm when this set amount of time elapses in a state where there is a
reflected wave of the PrOL setting value or higher.
PrOM
Sets the reflected wave alarm mask time after RF-ON.
PL
Sets the output limit value for the rated Pf value for each program number.