Ulvac RFP-N - Page 58

RF POWER SUPPLY and MATCHINGBOX
4. Functions
50
T
L
S
=
0
.
0
1
r
p
s
T
S
T
=
1
T
H
S
=
4
.
0
0
r
p
s
M
L
S
=
0
.
0
1
r
p
s
M
S
T
=
1
M
H
S
=
4
.
0
0
r
p
s
P
R
G
=
0
Figure 4-23 Motor speeds configuration screen (P9)
Item
Parameter details
TLS
The speed setting in the start of operation of the TUNE variable capacitor.
TST
Not used. (May not be displayed depending on the software version.)
THS
The speed setting maximum of the TUNE variable capacitor.
MLS
The speed setting in the start of operation of the MATCH variable capacitor.
MST
Not used. (May not be displayed depending on the software version.)
MHS
The speed setting maximum of the MATCH variable capacitor.
PRG
Selects the program number or displays the current value.