Ulvac RFP-N - Page 59

RF POWER SUPPLY and MATCHINGBOX
4. Functions
51
A
P
R
E
S
E
T
=
O
N
F
A
M
C
=
O
N
L
I
M
C
O
N
T
=
O
N
L
M
V
T
=
9
9
L
M
V
M
=
9
9
Figure 4-24 Limiter configuration screen (P10)
Item
Parameter details
APRESET
ON when you want to automatically perform a preset operation when RF is
turned off.
FAMC
ON when you want to forcibly perform the auto matching operation when
RF-ON.* Not normally set.
LIMCONT
Variable capacitor limiter operation ON-OFF setting.
LMVT
Sets the range that the TUNE variable capacitor operates during the variable
capacitor limiter operation.* Not normally set.
LMVM
Sets the range that the MATCH variable capacitor operates during the
variable capacitor limiter operation.* Not normally set.
* The limiter operation means the operation that moves the position of the variable capacitor to
the position of the maximum value or the minimum value when the variable capacitor hits the
limit during the auto matching operation.
P
.
L
O
C
K
=
D
I
S
B
L
E
,
3
0
m
i
n
Figure 4-25 Panel lock configuration screen (P11)
Item
Parameter details
P.LOCK
ENABLE: When there are no panel operations performed in the set time,
controller operations and the display are set to disabled.
DISABLE: Disables the above panel lock setting.