Ulvac RFP-N - Page 60

RF POWER SUPPLY and MATCHINGBOX
4. Functions
52
P
f
M
A
D
J
=
0
A
I
M
=
1
0
V
P
r
M
A
D
J
=
0
A
O
M
=
1
0
V
V
p
M
A
D
J
=
0
V
d
M
A
D
J
=
0
Figure 4-26 External IO voltage configuration screen (P12)
Item
Parameter details
PfMADJ
Performs fine adjustments of the Pf external analog monitor voltage.
* Not normally set.
PrMADJ
Performs fine adjustments of the Pr external analog monitor voltage.
* Not normally set.
VpMADJ
Performs fine adjustments of the Vpp external analog monitor voltage.
* Not normally set.
VdMADJ
Performs fine adjustments of the Vdc external analog monitor voltage.
* Not normally set.
AIM
Changes the full scale of the analog input voltage.
AIM=10V: 0 V to 10 V
AIM=5V: 0 V to 5 V (* Not normally set.)
AOM
Changes the full scale of the analog output voltage.
AOM=10V: 0 V to 10 V
AOM=5V: 0 V to 5 V (* Not normally set.)