Ulvac RFP-N - Page 61

RF POWER SUPPLY and MATCHINGBOX
4. Functions
53
P
f
O
S
=
0
F
b
N
O
N
E
F
a
0
0
0
0
F
c
Y
,
T
Figure 4-27 Pf offset adjustment screen (P13)
Item
Parameter details
PfOS
Performs fine adjustments of the actual output value for the Pf setting value.
* Not normally set.
Fb
Select FBUS.
NONE: No selection
ECAT: EtherCAT
*Normally not used.
Fa
FBUS station address display
*Normally not used.
Fc
ERROR judgment setting when communication error occurs during RF ON
when using EtherCAT communication
Y: ERROR judgment enable setting (Stops output with ERROR when
communication is abnormal.)
N: ERROR judgment invalid setting (does not stop output with ERROR when
communication is abnormal)
T: Sets the judgment time (s) when ERROR judgment is enabled.
*Normally not set.
P
C
B
T
E
M
P
W
A
T
E
R
:
A
I
M
:
2
5
.
0
M
:
7
.
0
L
Figure 4-28 Temperature flow rate display screen (P14)
Item
Parameter details
TEMP M
Displays the current temperature of the amplifier circuit board part in the RF
Generator.
WATER
M
Displays the current flow rate measured by the flow gauge.