Ulvac RFP-N - Page 91

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
83
Table 6-25 MBX-1350N - 5 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
90% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
80% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
70% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
60% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
50% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
40% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
30% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
20% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
10% 5000 5000 5000 5000 5000 5000 3950 2350 1450 900 600
00% 5000 5000 5000 5000 5000 5000 3500 2300 1450 900 600
TUNE
MATCH
MBX-1350N-(5T)
Table 6-26 MBX-1350N - 6 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 5000 5000 5000 5000 4000 2100 1200 650 400 150 50
90% 5000 5000 5000 5000 4200 2200 1200 650 400 150 50
80% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
70% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
60% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
50% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
40% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
30% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
20% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
10% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
00% 5000 5000 5000 5000 4400 2250 1200 650 400 150 50
TUNE
MATCH
MBX-1350N-(6T)
* When making adjustments such as adding a fixed capacitor, the deratings will differ from the above
derating table.