Ulvac RFP-N - Page 89

RF POWER SUPPLY and MATCHINGBOX
6. Matching Adjustment
81
Table 6-19 MBX-1330N - 5 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 3000 2700 1800 1260 960 750
90% 3000 3000 3000 3000 3000 3000 2970 1980 1380 1020 840
80% 3000 3000 3000 3000 3000 3000 3000 2250 1560 1170 930
70% 3000 3000 3000 3000 3000 3000 3000 2640 1830 1350 1020
60% 3000 3000 3000 3000 3000 3000 3000 3000 2160 1440 1020
50% 3000 3000 3000 3000 3000 3000 3000 3000 2160 1440 1020
40% 3000 3000 3000 3000 3000 3000 3000 3000 2160 1440 1020
30% 3000 3000 3000 3000 3000 3000 3000 3000 2160 1440 1020
20% 3000 3000 3000 3000 3000 3000 3000 2790 2070 1440 1020
10% 3000 3000 3000 3000 3000 3000 2430 1740 1290 990 840
00% 3000 3000 3000 3000 2850 1860 1290 930 690 540 450
TUNE
MATCH
MBX-1330N-(5T)
Table 6-20 MBX-1330N - 6 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 2130 1380 960 690 540 450
90% 3000 3000 3000 3000 3000 2280 1470 1020 750 570 480
80% 3000 3000 3000 3000 3000 2490 1620 1110 810 630 510
70% 3000 3000 3000 3000 3000 2820 1800 1230 900 690 570
60% 3000 3000 3000 3000 3000 3000 2100 1440 1020 780 660
50% 3000 3000 3000 3000 3000 3000 2580 1740 1260 960 780
40% 3000 3000 3000 3000 3000 3000 3000 2340 1650 1260 1020
30% 3000 3000 3000 3000 3000 3000 3000 3000 2160 1440 1020
20% 3000 3000 3000 3000 3000 3000 3000 2910 2160 1440 1020
10% 3000 3000 3000 3000 3000 3000 2520 1800 1380 1080 930
00% 3000 3000 3000 3000 2910 1920 1320 960 720 570 510
TUNE
MATCH
MBX-1330N-(6T)
* When making adjustments such as adding a fixed capacitor, the deratings will differ from the above
derating table.