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Veeco MS40 - Page 143

Veeco MS40
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Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
22 - Roughing Sniffer Probe
23 - Sniffer Mode Leak Testing
{ States 24 - 27 are for Sniffer Mode, Manual-Ranging}
24 - Standby
25 - Standby
26 - Roughing Sniffer Probe
27 - Sniffer Mode Leak Testing
28 — 38 - Automatic Tuning
39 — 44 - Checking Calibration
45 - Service Mode
‘J’ - Followed by 4 or 5 characters.
Reject Set Point in atm-cc/sec.
(e.g. 5708 = 5.7 x 10-8 atm-cc/sec)
(e.g. 10010 = 10.0 x 10-10 atm-cc/sec)
In software revisions 3.8 and later, this field is fixed at 5 characters.
(‘J’ + 4 numbers).
(e.g. 2308 = 2.3 x 10-8 atm-cc/sec. A mantissa of 10.-0 will never be
sent.)
‘K’ - Followed by 1 to 3 numbers.
Crossover #2 or Direct Flow Crossover in millitorr.
(e.g. 10 = 10 millitorr)
(e.g. 100 = 100 millitorr)
In software revisions 3.8 and later, this field is fixed at 4
characters.
(‘K’ + 3 numbers).
(e.g. 020 = 20 millitorr)
‘L’ - Followed by 14 numbers.
System Status information.
Char#
1 — Turbo Pump Status (‘0’ = OFF, ‘1’ = ON)
2 — Filament Status (‘0’ = OFF, ‘1’ = ON)
3 — Vent Valve Status (‘0’ = CLOSED, ‘1’ = OPEN)
4 — Sniff Valve Status (‘0’ = CLOSED, ‘1’ = OPEN)
5 — Gross Valve Status (‘0’ = CLOSED, ‘1’ = OPEN)
6 — Foreline Valve Status (‘0’ = CLOSED, ‘1’ = OPEN)
7 — Fine Valve Status (‘0’ = CLOSED, ‘1’ = OPEN)
1109-186-00 Rev. C d-v