Vessel STAT CLEAN G2-E - External View; Performance

5
 External View / Performance
No.G2-E
Static Elimination Performance
Air Pressure (MPa)
0.1
0.2
0.3
0.4
0.5
0.6
Air Volume (L/min)
66
111
153
193
233
279
Decay
time
+1000V ↓
+100V (min)
1.2
0.7
0.6
0.5
0.5
0.4
-1000V ↓
-100V (min)
1.2
0.8
0.6
0.5
0.4
0.4
Ion Balance (V)
-0.6
1.2
1.6
2.3
3.7
4.1
※Measured at 150mm from the target object.