Edwards RV5 User Manual

Table 4 Performance data - High vacuum mode - 2
HIGH VACUUM MODE S
Parameter Units
RV8 RV12
1-phase 3-phase 1-phase 3-phase
Gas-ballast control closed (posion ‘0’)
Ulmate total pressure
mbar
2 x 10
-3
2 x 10
-3
Pa
2 x 10
-1
2 x 10
-1
Gas-ballast control low ow (posion ‘I’)
Ulmate total pressure
mbar
3 x 10
-2
3 x 10
-2
Pa 3 3
Gas-ballast ow
l min
-1
5 5
Maximum water vapour pump-
ing rate
kg h
-1
0.06 0.04 0.06 0.04
Maximum water vapour inlet
pressure
mbar 10 7 7 5
Pa
1 x 10
3
7 x 10
2
7 x 10
2
5 x 10
2
Gas-ballast control high ow (posion ‘II’)
Ulmate total pressure
mbar
6 x 10
-2
6 x 10
-2
Pa 6 6
Gas-ballast ow
l min
-1
16 16
Maximum water vapour pump-
ing rate
kg h
-1
0.22 0.20 0.29 0.25
Maximum water vapour inlet
pressure
mbar 38 34 32 28
Pa
3.8 x 10
3
3.4 x 10
3
3.2 x 10
3
2.8 x 10
3
Table 5 Performance data - High throughput mode - 1
HIGH THROUGHPUT MODE S
Parameter Units
RV3 RV5
1-phase 3-phase 1-phase 3-phase
Gas-ballast control closed (posion ‘0’)
Ulmate total pressure
mbar
3 x 10
-2
3 x 10
-2
Pa 3 3
Gas-ballast control low ow (posion ‘I’)
Ulmate total pressure
mbar
6 x 10
-2
6 x 10
-2
Pa 6 6
03/2021 - ©Edwards Limited
Page 15A65201880_AA
A65201880_AA - Technical data

Edwards RV5 Specifications

General

Brand	Edwards
Model	RV5
Category	Water Pump
Language	English